Nanoscale Technology, 7.5 credits

The course describes common processes and materials in microfabrication (photolithography, various types of deposition and etching of thin films), advanced nano-fabrication processes (electron-beam lithography, focused ion-beam etching), as well as different nano-characterization techniques and clean-room equipment. The course has the main focus on the interesting physics behind micro/nano-technology (such as vacuum, plasma, electron-optics, materials science, e.t.c.) and provides an overview over modern research in the nano-science area and the on-going progress in development of processes and materials for micro/nano-technology.

Further course information will appear soon on this page. Until then, information can be found on the department website.

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