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Nanoscale Technology

  • 7.5 credits

The course describes common processes and materials in microfabrication (photolithography, various types of deposition and etching of thin films), advanced nano-fabrication processes (electron-beam lithography, focused ion-beam etching), as well as different nano-characterization techniques and clean-room equipment. The course has the main focus on the interesting physics behind micro/nano-technology (such as vacuum, plasma, electron-optics, materials science, e.t.c.) and provides an overview over modern research in the nano-science area and the on-going progress in development of processes and materials for micro/nano-technology.

Further course information will appear soon on this page. Until then, information can be found on the department website.
  • Course structure


    Vladimir Krasnov

    Phone: +468 553 786 06


  • Schedule

    The schedule will be available no later than one month before the start of the course. We do not recommend print-outs as changes can occur. At the start of the course, your department will advise where you can find your schedule during the course.
  • Course literature

    Note that the course literature can be changed up to two months before the start of the course.

    The Materials Science of Thin Films by Milton Ohring

  • Contact

    Course coordinator and teacher:
    Vladimir Krasnov, phone: +468 553 786 06, e-mail:

    Course assistant:
    Taras Golod, phone: +468 553 786 11, e-mail:


    Academic advisor at the Department of Physics:

    Student office: