Nanoscale Technology, 7.5 credits

About this education

The course describes common processes and materials in microfabrication (photolithography, various types of deposition and etching of thin films), advanced nano-fabrication processes (electron-beam lithography, focused ion-beam etching), as well as different nano-characterization techniques and clean-room equipment. The course has the main focus on the interesting physics behind micro/nano-technology (such as vacuum, plasma, electron-optics, materials science, e.t.c.) and provides an overview over modern research in the nano-science area and the on-going progress in development of processes and materials for micro/nano-technology.

Know what you want to study?

Find your study programme

What can I study?

Explore our subjects