The course describes common processes and materials in microfabrication (photolithography, various types of deposition and etching of thin films), advanced nano-fabrication processes (electron-beam lithography, focused ion-beam etching), as well as different nano-characterization techniques and clean-room equipment. The course has the main focus on the interesting physics behind micro/nano-technology (such as vacuum, plasma, electron-optics, materials science, e.t.c.) and provides an overview over modern research in the nano-science area and the on-going progress in development of processes and materials for micro/nano-technology.
Phone: +468 553 786 06
ScheduleThe schedule will be available no later than one month before the start of the course. We do not recommend print-outs as changes can occur. At the start of the course, your department will advise where you can find your schedule during the course.
Course literatureNote that the course literature can be changed up to two months before the start of the course.
The Materials Science of Thin Films by Milton Ohring